Semiconductor Wafer Handling
C3 accuracy or better, low-particle-emission seals, smooth motion at sub-micron level. THK SHS and SSR series with QZ lubricator for Class 100 cleanroom wafer transfer robots and lithography stages.
About THK
THK Co., Ltd., headquartered in Tokyo, Japan, is the pioneering inventor of the Linear Motion (LM) Guide and remains the undisputed global benchmark for linear motion technology. Founded in 1971, THK revolutionized industrial automation by replacing sliding friction with rolling contact, enabling unprecedented levels of positioning accuracy, smoothness, and longevity in machine tool and precision equipment design.
Today, THK's LM Guides, Ball Screws, and integrated actuator modules serve the most demanding applications across semiconductor fabrication, optical inspection, ultra-precision machining, and medical device manufacturing. With accuracy grades spanning C0 (nanometer-class) through C7 and dynamic load ratings from 8.5 kN to over 326 kN, THK offers the widest performance envelope in the linear motion industry.
Core Product Lines
HSR / SSR / SHS / SNR / SNS
LM Guide Rails & Blocks
Ball-type and roller-type linear guides in standard, wide, high-rigidity, and ultra-compact profiles. Four-row ball circulation for equal load capacity in all directions.
Applications: Machine tools, semiconductor equipment, injection molding, general automation
BNK / BIF / BLK / BTK / DIK
Ball Screw & Nut Assemblies
Precision-ground and rolled ball screws with preloaded nut configurations. C0-C7 accuracy grades. Available with end-cap, tube, and deflector return systems.
Applications: CNC machining centers, wire bonders, laser cutting, electronic assembly
RB / RA / RE / RU
Crossed Roller Bearings
High-rigidity crossed cylindrical roller bearings for rotary tables and joint mechanisms. Compact design with separable inner/outer rings.
Applications: Robot joints, rotary indexing tables, medical CT scanner gantries
KR / SKR / KRH
Miniature Linear Modules
Integrated smart combination units combining LM guide, ball screw, and mounting base in a single compact module. Plug-and-play linear actuation.
Applications: Lab automation, pick & place, desktop CNC, optical alignment stages
Technical Parameters
| Parameter | Value |
|---|---|
| Accuracy Grade (JIS B 1192) | C0 / C3 / C5 / C7 |
| Dynamic Load Rating (LM Guide) | 8.5 kN - 326 kN |
| Friction Coefficient | 0.001 - 0.005 |
| Operating Temperature (Standard) | -20°C - +80°C |
| Ball Screw Lead Range | 1 mm - 40 mm |
| Nominal Screw Diameter | 6 mm - 100 mm |
Key Applications & Operating Conditions
Optical Inspection Modules
Ultra-smooth running with micro-vibration suppression. C0/C3 grade ball screws paired with precision support bearings for interferometric alignment and lens centering equipment.
Ultra-Precision Machine Tools
C0 preloaded ball screws with high-rigidity nut configuration. SNR/SNS roller guides for heavy cutting loads while maintaining sub-micron positioning in diamond turning and grinding machines.
Automation Long-Stroke Transfer Lines
C5 grade HSR guides with full-length dust covers and automatic lubrication units. Proven in automotive body-in-white lines and battery module assembly with 50,000+ km service life.
Cross-Brand Compatibility Reference
THK and Bosch Rexroth can be cross-evaluated in heavy-load, high-rigidity scenarios — both offer roller guides exceeding 300 kN dynamic load. THK and HIWIN share interchangeable form factors for many standard automation-grade guide rails (verify preload, accuracy grade, and mounting bolt pitch before substitution). For miniature and ultra-precision applications (C0/C3), cross-brand substitution is not recommended — the THK OEM specification should be maintained due to factory-matched tolerances and proprietary seal technology.
Common Faults & Maintenance
- Abnormal noise during guide rail operation: Inspect lubrication interval and grease condition. Check preload torque for loosening. Verify that end seals and under-seals are intact and not allowing contamination ingress.
- Ball screw positioning drift (lost steps): Confirm nut preload has not relaxed. Check support bearing axial clearance and runout. Verify motor coupling concentricity and that the fixed-end bearing housing is properly torqued to the machine bed.
- Block stick-slip (jerky motion at low speed): Insufficient lubrication or rail surface contamination. Clean raceways with lint-free wipes and low-viscosity solvent, then re-lubricate with THK AFE or AFG grease per the OEM lubrication schedule.
Frequently Asked Questions
Q1: What is the difference between THK C3 and C5 accuracy grades for ball screws?
C3 grade has a cumulative lead error of ±12 µm per 300 mm stroke, while C5 allows ±18 µm per 300 mm (JIS B 1192). C3 is the standard for CNC grinding machines and high-speed machining centers. C5 is sufficient for general transfer automation and pick-and-place. For semiconductor lithography, specify C0 (±3 µm/300 mm). Our engineers can help you select the right grade for your positioning tolerance budget.
Q2: Can THK LM guides be used in cleanroom environments?
Yes. THK offers low-dust-generation seal configurations (end seals + under seals + inner seals) compatible with Class 100 (ISO 5) cleanrooms. The QZ self-lubricating option eliminates grease aerosol contamination by delivering lubricant through a fiber net directly to the ball circulation path.
Q3: How do I cross-reference THK HSR series with HIWIN HG series?
THK HSR-A and HIWIN HG-C share identical rail widths and bolt pitches for many sizes (15, 20, 25, 30, 35, 45 mm rail widths). However, the block height, preload class designation, and dynamic load ratings differ slightly. Always verify the mounting hole dimensions from both catalogs and confirm the preload (THK C0/C1 vs HIWIN Z0/Z1/Z2) before substitution. Contact thk@591888888.com for a detailed interchange matrix.
Q4: What is the typical lead time for THK products ordered through Xianhuihui Technology?
Standard catalog LM guides and C5 ball screws typically ship within 1-2 weeks from our Shenzhen warehouse. C3 and C0 precision-grade items may require 3-5 weeks. Custom-length ball screws and special seal configurations can take 6-8 weeks. We maintain buffer stock of popular HSR/SSR sizes for urgent requirements.